719.61 9.61 (1.35%)
753.2K XNAS Volume
XNAS 19 Mar, 2025 5:30 PM (EDT)
| Client Name | Client Category | Action | Reported to Exchange | Quantity | Post Transaction Holding | Traded % | Avg. Price | Value | Security Type |
|---|---|---|---|---|---|---|---|---|---|
| Richard P. Wallace | President and CEO | Gift of securities by or to the insider at price $ 0.00 per share. | 11 Feb 2025 | 805 | 89,542 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | President and CEO | Gift of securities by or to the insider at price $ 0.00 per share. | 12 Nov 2024 | 676 | 104,653 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 663.01 per share. | 12 Nov 2024 | 14,306 | 90,347 (0%) | 0% | 663.0 | 9,485,021 | Common Stock |
| Richard P. Wallace | President and CEO | Gift of securities by or to the insider at price $ 0.00 per share. | 12 Nov 2024 | 2,380 | 0 (0%) | 0% | 0 | Common Stock | |
| Kevin J. Kennedy | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Nov 2024 | 350 | 3,011 (0%) | 0% | 0 | Common Stock | |
| Michael R. McMullen | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Nov 2024 | 350 | 975 (0%) | 0% | 0 | Common Stock | |
| Robert M. Calderoni | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Nov 2024 | 433 | 3,433 (0%) | 0% | 0 | Common Stock | |
| Victor Peng | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Nov 2024 | 350 | 1,547 (0%) | 0% | 0 | Common Stock | |
| Robert A. Rango | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Nov 2024 | 350 | 11,693 (0%) | 0% | 0 | Common Stock | |
| Gary B. Moore | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Nov 2024 | 350 | 15,028 (0%) | 0% | 0 | Common Stock | |
| Emiko Higashi | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Nov 2024 | 350 | 14,766 (0%) | 0% | 0 | Common Stock | |
| Jeneanne M. Hanley | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Nov 2024 | 350 | 3,897 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Sale of securities on an exchange or to another person at price $ 818.51 per share. | 19 Aug 2024 | 9,676 | 32,175 (0%) | 0% | 818.5 | 7,919,903 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 740.63 per share. | 07 Aug 2024 | 5,361 | 35,805 (0%) | 0% | 740.6 | 3,970,517 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 740.63 per share. | 07 Aug 2024 | 2,038 | 14,663 (0%) | 0% | 740.6 | 1,509,404 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 703.55 per share. | 06 Aug 2024 | 2,274 | 132,999 (0%) | 0% | 703.6 | 1,599,879 | Common Stock |
| Richard P. Wallace | President and CEO | Gift of securities by or to the insider at price $ 0.00 per share. | 06 Aug 2024 | 3,055 | 2,380 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 705.01 per share. | 06 Aug 2024 | 17,437 | 105,329 (0%) | 0% | 705.0 | 12,293,259 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 703.54 per share. | 06 Aug 2024 | 10,233 | 122,766 (0%) | 0% | 703.5 | 7,199,279 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 703.96 per share. | 06 Aug 2024 | 601 | 3,429 (0%) | 0% | 704.0 | 423,077 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 705.01 per share. | 06 Aug 2024 | 814 | 2,615 (0%) | 0% | 705.0 | 573,878 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 704.55 per share. | 06 Aug 2024 | 200 | 4,031 (0%) | 0% | 704.6 | 140,910 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 703.48 per share. | 06 Aug 2024 | 1,003 | 44,176 (0%) | 0% | 703.5 | 705,593 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 703.60 per share. | 06 Aug 2024 | 3,009 | 41,166 (0%) | 0% | 703.6 | 2,117,127 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 703.63 per share. | 06 Aug 2024 | 3,511 | 41,851 (0%) | 0% | 703.6 | 2,470,447 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 703.83 per share. | 06 Aug 2024 | 1,170 | 45,363 (0%) | 0% | 703.8 | 823,482 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 705.01 per share. | 06 Aug 2024 | 1,291 | 16,701 (0%) | 0% | 705.0 | 910,168 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 703.84 per share. | 06 Aug 2024 | 501 | 19,496 (0%) | 0% | 703.8 | 352,622 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 703.60 per share. | 06 Aug 2024 | 1,504 | 17,992 (0%) | 0% | 703.6 | 1,058,215 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Sale of securities on an exchange or to another person at price $ 649.84 per share. | 03 Aug 2024 | 2,369 | 9,539 (0%) | 0% | 649.8 | 1,539,471 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.49 per share. | 03 Aug 2024 | 715 | 11,908 (0%) | 0% | 696.5 | 497,989 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.64 per share. | 03 Aug 2024 | 343 | 12,623 (0%) | 0% | 696.6 | 238,946 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.78 per share. | 03 Aug 2024 | 274 | 12,967 (0%) | 0% | 696.8 | 190,918 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 697.23 per share. | 03 Aug 2024 | 255 | 13,241 (0%) | 0% | 697.2 | 177,793 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 698.80 per share. | 03 Aug 2024 | 181 | 13,496 (0%) | 0% | 698.8 | 126,483 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Sale of securities on an exchange or to another person at price $ 675.00 per share. | 03 Aug 2024 | 242 | 9,297 (0%) | 0% | 675 | 163,350 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 649.84 per share. | 03 Aug 2024 | 709 | 19,998 (0%) | 0% | 649.8 | 460,737 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.48 per share. | 03 Aug 2024 | 953 | 20,707 (0%) | 0% | 696.5 | 663,745 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.86 per share. | 03 Aug 2024 | 317 | 21,660 (0%) | 0% | 696.9 | 220,904 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.87 per share. | 03 Aug 2024 | 369 | 21,977 (0%) | 0% | 696.9 | 257,146 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 697.69 per share. | 03 Aug 2024 | 328 | 22,347 (0%) | 0% | 697.7 | 228,842 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.18 per share. | 03 Aug 2024 | 1,944 | 149,061 (0%) | 0% | 696.2 | 1,353,377 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.23 per share. | 03 Aug 2024 | 9,648 | 135,274 (0%) | 0% | 696.2 | 6,717,180 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.44 per share. | 03 Aug 2024 | 2,143 | 144,922 (0%) | 0% | 696.4 | 1,492,477 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.21 per share. | 03 Aug 2024 | 1,995 | 147,066 (0%) | 0% | 696.2 | 1,388,929 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 708.85 per share. | 03 Aug 2024 | 54 | 5,519 (0%) | 0% | 708.9 | 38,278 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.55 per share. | 03 Aug 2024 | 111 | 5,408 (0%) | 0% | 696.5 | 77,317 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 700.55 per share. | 03 Aug 2024 | 102 | 5,305 (0%) | 0% | 700.5 | 71,456 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 697.55 per share. | 03 Aug 2024 | 249 | 5,056 (0%) | 0% | 697.6 | 173,691 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 649.84 per share. | 03 Aug 2024 | 825 | 4,231 (0%) | 0% | 649.8 | 536,118 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.54 per share. | 03 Aug 2024 | 722 | 48,934 (0%) | 0% | 696.5 | 502,900 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.19 per share. | 03 Aug 2024 | 2,263 | 45,179 (0%) | 0% | 696.2 | 1,575,488 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.27 per share. | 03 Aug 2024 | 754 | 47,442 (0%) | 0% | 696.3 | 524,990 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.87 per share. | 03 Aug 2024 | 738 | 48,196 (0%) | 0% | 696.9 | 514,290 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.39 per share. | 03 Aug 2024 | 2,501 | 46,534 (0%) | 0% | 696.4 | 1,741,683 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.95 per share. | 03 Aug 2024 | 833 | 49,035 (0%) | 0% | 697.0 | 580,561 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 697.00 per share. | 03 Aug 2024 | 775 | 49,869 (0%) | 0% | 697.0 | 540,177 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.54 per share. | 03 Aug 2024 | 722 | 50,645 (0%) | 0% | 696.5 | 502,900 | Common Stock |
| Richard P. Wallace | President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 38,920 | 142,764 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 10,658 | 103,844 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | President and CEO | Other type of transaction at price $ 482.95 per share. | 01 Aug 2024 | 44 | 93,186 (0%) | 0% | 483.0 | 21,250 | Common Stock |
| Richard P. Wallace | President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 8,241 | 151,005 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 1,441 | 5,574 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 432 | 4,132 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 3,633 | 35,034 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 5,494 | 49,657 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 9,129 | 44,163 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Other type of transaction at price $ 482.95 per share. | 01 Aug 2024 | 44 | 31,400 (0%) | 0% | 483.0 | 21,250 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 5,494 | 51,368 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Other type of transaction at price $ 482.95 per share. | 01 Aug 2024 | 44 | 32,150 (0%) | 0% | 483.0 | 21,250 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 3,633 | 35,783 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 10,090 | 45,873 (0%) | 0% | 0 | Common Stock | |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 2,198 | 13,678 (0%) | 0% | 0 | Common Stock | |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 1,271 | 7,635 (0%) | 0% | 0 | Common Stock | |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 3,844 | 11,480 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 3,844 | 20,477 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 2,198 | 22,675 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Aug 2024 | 2,422 | 16,633 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 819.41 per share. | 02 Jul 2024 | 44 | 3,700 (0%) | 0% | 819.4 | 36,054 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Other type of transaction at price $ 482.95 per share. | 02 Jul 2024 | 44 | 3,744 (0%) | 0% | 483.0 | 21,250 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 819.41 per share. | 02 Jul 2024 | 44 | 14,210 (0%) | 0% | 819.4 | 36,054 | Common Stock |
| Brian Lorig | Executive Vice President | Other type of transaction at price $ 482.95 per share. | 02 Jul 2024 | 44 | 14,254 (0%) | 0% | 483.0 | 21,250 | Common Stock |
| Oreste Donzella | Executive Vice President | Grant, award, or other acquisition of securities at price $ 482.95 per share. | 28 Jun 2024 | 44 | 16,967 (0%) | 0% | 483.0 | 21,250 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 788.58 per share. | 23 May 2024 | 1,019 | 31,356 (0%) | 0% | 788.6 | 803,563 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Sale of securities on an exchange or to another person at price $ 760.00 per share. | 21 May 2024 | 7,833 | 32,105 (0%) | 0% | 760 | 5,953,080 | Common Stock |
| Richard P. Wallace | President and CEO | Gift of securities by or to the insider at price $ 0.00 per share. | 07 May 2024 | 3,055 | 5,435 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 716.63 per share. | 07 May 2024 | 14,009 | 93,141 (0%) | 0% | 716.6 | 10,039,270 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 699.16 per share. | 06 May 2024 | 3,537 | 14,210 (0%) | 0% | 699.2 | 2,472,929 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 700.65 per share. | 11 Apr 2024 | 16,894 | 107,150 (0%) | 0% | 700.6 | 11,836,723 | Common Stock |
| Bren Higgins D. | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 705.04 per share. | 26 Mar 2024 | 7,018 | 32,375 (0%) | 0% | 705.0 | 4,947,971 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 697.85 per share. | 25 Mar 2024 | 3,257 | 16,922 (0%) | 0% | 697.8 | 2,272,897 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 695.97 per share. | 20 Mar 2024 | 6,804 | 39,393 (0%) | 0% | 696.0 | 4,735,377 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 696.04 per share. | 20 Mar 2024 | 7,422 | 39,938 (0%) | 0% | 696.0 | 5,166,017 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 695.96 per share. | 20 Mar 2024 | 3,195 | 17,747 (0%) | 0% | 696.0 | 2,223,591 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 695.95 per share. | 20 Mar 2024 | 3,636 | 20,179 (0%) | 0% | 696.0 | 2,530,480 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 474.55 per share. | 14 Aug 2023 | 2,621 | 3,699 (0%) | 0% | 474.6 | 1,243,796 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 501.53 per share. | 07 Aug 2023 | 3,273 | 154,620 (0%) | 0% | 501.5 | 1,641,508 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 503.46 per share. | 07 Aug 2023 | 4,634 | 147,785 (0%) | 0% | 503.5 | 2,333,034 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 502.30 per share. | 07 Aug 2023 | 2,201 | 152,419 (0%) | 0% | 502.3 | 1,105,562 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 500.26 per share. | 07 Aug 2023 | 1,152 | 157,893 (0%) | 0% | 500.3 | 576,300 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 507.08 per share. | 07 Aug 2023 | 100 | 124,045 (0%) | 0% | 507.1 | 50,708 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 506.22 per share. | 07 Aug 2023 | 3,346 | 124,145 (0%) | 0% | 506.2 | 1,693,812 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 505.37 per share. | 07 Aug 2023 | 5,282 | 127,491 (0%) | 0% | 505.4 | 2,669,364 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 504.43 per share. | 07 Aug 2023 | 15,012 | 132,773 (0%) | 0% | 504.4 | 7,572,503 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 500.00 per share. | 07 Aug 2023 | 3,061 | 47,818 (0%) | 0% | 500 | 1,530,500 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Sale of securities on an exchange or to another person at price $ 500.00 per share. | 07 Aug 2023 | 870 | 12,315 (0%) | 0% | 500 | 435,000 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 500.00 per share. | 07 Aug 2023 | 2,738 | 20,942 (0%) | 0% | 500 | 1,369,000 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 2,145 | 171,555 (0%) | 0% | 496.5 | 1,064,928 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 10,235 | 159,045 (0%) | 0% | 496.5 | 5,081,370 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 2,275 | 169,280 (0%) | 0% | 496.5 | 1,129,469 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 1,996 | 173,700 (0%) | 0% | 496.5 | 990,954 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 201 | 6,923 (0%) | 0% | 496.5 | 99,790 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 112 | 7,243 (0%) | 0% | 496.5 | 55,605 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 119 | 7,124 (0%) | 0% | 496.5 | 59,080 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 603 | 6,320 (0%) | 0% | 496.5 | 299,371 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 1,004 | 53,890 (0%) | 0% | 496.5 | 498,456 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 740 | 55,649 (0%) | 0% | 496.5 | 367,388 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 755 | 54,894 (0%) | 0% | 496.5 | 374,835 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 3,011 | 50,879 (0%) | 0% | 496.5 | 1,494,871 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 776 | 66,841 (0%) | 0% | 496.5 | 385,261 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 834 | 66,007 (0%) | 0% | 496.5 | 414,056 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 1,171 | 64,836 (0%) | 0% | 496.5 | 581,366 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 3,512 | 61,324 (0%) | 0% | 496.5 | 1,743,603 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 166 | 13,757 (0%) | 0% | 496.5 | 82,414 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 228 | 13,185 (0%) | 0% | 496.5 | 113,195 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 344 | 13,413 (0%) | 0% | 496.5 | 170,786 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 370 | 26,006 (0%) | 0% | 496.5 | 183,694 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 1,506 | 23,680 (0%) | 0% | 496.5 | 747,684 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 502 | 25,186 (0%) | 0% | 496.5 | 249,228 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 318 | 25,688 (0%) | 0% | 496.5 | 157,877 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 1,492 | 26,448 (0%) | 0% | 496.5 | 740,733 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 334 | 28,755 (0%) | 0% | 496.5 | 165,821 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 317 | 28,438 (0%) | 0% | 496.5 | 157,381 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 496.47 per share. | 04 Aug 2023 | 498 | 27,940 (0%) | 0% | 496.5 | 247,242 | Common Stock |
| Richard P. Wallace | President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 15,684 | 134,412 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 41,284 | 175,696 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 2,428 | 7,355 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 635 | 4,927 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 5,828 | 44,247 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 12,142 | 56,389 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 5,828 | 53,451 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 14,166 | 67,617 (0%) | 0% | 0 | Common Stock | |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 1,695 | 13,923 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 2,649 | 20,306 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 6,070 | 26,376 (0%) | 0% | 0 | Common Stock | |
| Oreste Donzella | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 5,667 | 29,089 (0%) | 0% | 0 | Common Stock | |
| Oreste Donzella | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Aug 2023 | 1,801 | 23,422 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 504.60 per share. | 02 Aug 2023 | 4,863 | 38,419 (0%) | 0% | 504.6 | 2,453,870 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 504.60 per share. | 02 Aug 2023 | 2,810 | 17,657 (0%) | 0% | 504.6 | 1,417,926 | Common Stock |
| Richard P. Wallace | President and CEO | Other type of transaction at price $ 321.97 per share. | 01 Aug 2023 | 66 | 136,267 (0%) | 0% | 322.0 | 21,250 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 3,189 | 118,728 (0%) | 0% | 514.3 | 1,640,039 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 14,350 | 121,917 (0%) | 0% | 514.3 | 7,379,918 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Other type of transaction at price $ 321.97 per share. | 01 Aug 2023 | 66 | 5,357 (0%) | 0% | 322.0 | 21,250 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 746 | 4,611 (0%) | 0% | 514.3 | 383,653 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 319 | 4,292 (0%) | 0% | 514.3 | 164,055 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 1,594 | 43,282 (0%) | 0% | 514.3 | 819,762 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 4,783 | 44,876 (0%) | 0% | 514.3 | 2,459,801 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Other type of transaction at price $ 321.97 per share. | 01 Aug 2023 | 66 | 49,659 (0%) | 0% | 322.0 | 21,250 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Other type of transaction at price $ 321.97 per share. | 01 Aug 2023 | 66 | 55,063 (0%) | 0% | 322.0 | 21,250 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 1,860 | 47,623 (0%) | 0% | 514.3 | 956,561 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 5,580 | 49,483 (0%) | 0% | 514.3 | 2,869,682 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 691 | 20,467 (0%) | 0% | 514.3 | 355,367 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 2,073 | 21,158 (0%) | 0% | 514.3 | 1,066,102 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 2,117 | 22,327 (0%) | 0% | 514.3 | 1,088,731 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 514.28 per share. | 01 Aug 2023 | 706 | 21,621 (0%) | 0% | 514.3 | 363,082 | Common Stock |
| Oreste Donzella | Executive Vice President | Other type of transaction at price $ 321.97 per share. | 01 Aug 2023 | 66 | 24,444 (0%) | 0% | 322.0 | 21,250 | Common Stock |
| Michael R. McMullen | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 24 Jul 2023 | 132 | 132 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Other type of transaction at price $ 321.97 per share. | 05 Jul 2023 | 66 | 23,297 (0%) | 0% | 322.0 | 21,250 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 475.30 per share. | 05 Jul 2023 | 66 | 23,231 (0%) | 0% | 475.3 | 31,370 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Gift of securities by or to the insider at price $ 0.00 per share. | 01 Jun 2023 | 175 | 54,997 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 425.00 per share. | 18 May 2023 | 1,727 | 23,231 (0%) | 0% | 425 | 733,975 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Sale of securities on an exchange or to another person at price $ 405.00 per share. | 16 May 2023 | 1,915 | 55,172 (0%) | 0% | 405 | 775,575 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 381.81 per share. | 05 May 2023 | 700 | 139,852 (0%) | 0% | 381.8 | 267,267 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 387.74 per share. | 05 May 2023 | 200 | 136,201 (0%) | 0% | 387.7 | 77,548 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 386.22 per share. | 05 May 2023 | 1,000 | 136,401 (0%) | 0% | 386.2 | 386,220 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 384.65 per share. | 05 May 2023 | 955 | 137,401 (0%) | 0% | 384.7 | 367,341 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 383.55 per share. | 05 May 2023 | 996 | 138,356 (0%) | 0% | 383.6 | 382,016 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 382.61 per share. | 05 May 2023 | 500 | 139,352 (0%) | 0% | 382.6 | 191,305 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 380.41 per share. | 05 May 2023 | 231 | 140,552 (0%) | 0% | 380.4 | 87,875 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 380.38 per share. | 03 May 2023 | 3,914 | 149,788 (0%) | 0% | 380.4 | 1,488,807 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 385.52 per share. | 03 May 2023 | 300 | 140,783 (0%) | 0% | 385.5 | 115,656 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 384.52 per share. | 03 May 2023 | 2,149 | 141,083 (0%) | 0% | 384.5 | 826,333 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 383.74 per share. | 03 May 2023 | 2,378 | 143,232 (0%) | 0% | 383.7 | 912,534 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 382.32 per share. | 03 May 2023 | 1,449 | 145,610 (0%) | 0% | 382.3 | 553,982 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 381.42 per share. | 03 May 2023 | 2,729 | 147,059 (0%) | 0% | 381.4 | 1,040,895 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 380.31 per share. | 02 May 2023 | 12,098 | 159,103 (0%) | 0% | 380.3 | 4,600,990 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 385.82 per share. | 02 May 2023 | 1,400 | 153,702 (0%) | 0% | 385.8 | 540,148 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 384.79 per share. | 02 May 2023 | 2,100 | 155,102 (0%) | 0% | 384.8 | 808,059 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 382.57 per share. | 02 May 2023 | 1,100 | 157,202 (0%) | 0% | 382.6 | 420,827 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 381.34 per share. | 02 May 2023 | 801 | 158,302 (0%) | 0% | 381.3 | 305,453 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 377.91 per share. | 11 Apr 2023 | 20,547 | 171,201 (0%) | 0% | 377.9 | 7,764,917 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 400.00 per share. | 03 Apr 2023 | 1,728 | 24,958 (0%) | 0% | 400 | 691,200 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 393.73 per share. | 31 Mar 2023 | 3,882 | 24,378 (0%) | 0% | 393.7 | 1,528,460 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 382.43 per share. | 22 Mar 2023 | 6,964 | 49,593 (0%) | 0% | 382.4 | 2,663,243 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 389.94 per share. | 20 Mar 2023 | 6,795 | 56,557 (0%) | 0% | 389.9 | 2,649,642 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 389.94 per share. | 20 Mar 2023 | 7,362 | 62,833 (0%) | 0% | 389.9 | 2,870,738 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Sale of securities on an exchange or to another person at price $ 395.00 per share. | 20 Mar 2023 | 1,915 | 57,087 (0%) | 0% | 395 | 756,425 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Sale of securities on an exchange or to another person at price $ 389.55 per share. | 20 Mar 2023 | 3,831 | 59,002 (0%) | 0% | 389.5 | 1,492,366 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 389.94 per share. | 20 Mar 2023 | 3,093 | 26,686 (0%) | 0% | 389.9 | 1,206,084 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 389.94 per share. | 20 Mar 2023 | 3,649 | 28,260 (0%) | 0% | 389.9 | 1,422,891 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 380.47 per share. | 22 Feb 2023 | 1,020 | 63,352 (0%) | 0% | 380.5 | 388,079 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Sale of securities on an exchange or to another person at price $ 397.61 per share. | 14 Feb 2023 | 2,898 | 70,195 (0%) | 0% | 397.6 | 1,152,274 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Sale of securities on an exchange or to another person at price $ 405.00 per share. | 14 Feb 2023 | 966 | 73,093 (0%) | 0% | 405 | 391,230 | Common Stock |
| Jeneanne M. Hanley | Director | Sale of securities on an exchange or to another person at price $ 406.67 per share. | 13 Dec 2022 | 500 | 3,554 (0%) | 0% | 406.7 | 203,333 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 400.00 per share. | 09 Dec 2022 | 3,127 | 29,779 (0%) | 0% | 400 | 1,250,800 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 380.66 per share. | 02 Dec 2022 | 3,194 | 31,909 (0%) | 0% | 380.7 | 1,215,828 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 361.77 per share. | 17 Nov 2022 | 1,621 | 64,372 (0%) | 0% | 361.8 | 586,429 | Common Stock |
| Kiran M. Patel | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Nov 2022 | 704 | 1,262 (0%) | 0% | 0 | Common Stock | |
| Kevin J. Kennedy | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Nov 2022 | 704 | 2,168 (0%) | 0% | 0 | Common Stock | |
| Robert M. Calderoni | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Nov 2022 | 928 | 2,392 (0%) | 0% | 0 | Common Stock | |
| Victor Peng | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Nov 2022 | 704 | 4,769 (0%) | 0% | 0 | Common Stock | |
| Robert A. Rango | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Nov 2022 | 704 | 14,119 (0%) | 0% | 0 | Common Stock | |
| Gary B. Moore | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Nov 2022 | 704 | 14,185 (0%) | 0% | 0 | Common Stock | |
| Emiko Higashi | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Nov 2022 | 704 | 14,182 (0%) | 0% | 0 | Common Stock | |
| Marie Myers | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Nov 2022 | 704 | 3,037 (0%) | 0% | 0 | Common Stock | |
| Jeneanne M. Hanley | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Nov 2022 | 704 | 4,054 (0%) | 0% | 0 | Common Stock | |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Sale of securities on an exchange or to another person at price $ 320.34 per share. | 21 Sep 2022 | 3,155 | 12,228 (0%) | 0% | 320.3 | 1,010,673 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 322.86 per share. | 21 Sep 2022 | 2,367 | 15,383 (0%) | 0% | 322.9 | 764,210 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 334.86 per share. | 01 Sep 2022 | 2,417 | 35,103 (0%) | 0% | 334.9 | 809,357 | Common Stock |
| Robert M. Calderoni | Director | Gift of securities by or to the insider at price $ 0.00 per share. | 31 Aug 2022 | 40 | 11,529 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Sale of securities on an exchange or to another person at price $ 375.00 per share. | 25 Aug 2022 | 3,868 | 74,059 (0%) | 0% | 375 | 1,450,500 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Sale of securities on an exchange or to another person at price $ 360.26 per share. | 24 Aug 2022 | 7,736 | 77,927 (0%) | 0% | 360.3 | 2,786,971 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 385.22 per share. | 15 Aug 2022 | 8,618 | 191,748 (0%) | 0% | 385.2 | 3,319,826 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 384.22 per share. | 15 Aug 2022 | 12,083 | 200,366 (0%) | 0% | 384.2 | 4,642,530 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 383.11 per share. | 15 Aug 2022 | 10,770 | 212,449 (0%) | 0% | 383.1 | 4,126,095 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 382.25 per share. | 15 Aug 2022 | 18,206 | 223,219 (0%) | 0% | 382.3 | 6,959,244 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 381.24 per share. | 15 Aug 2022 | 15,186 | 241,425 (0%) | 0% | 381.2 | 5,789,511 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 380.30 per share. | 15 Aug 2022 | 5,766 | 256,611 (0%) | 0% | 380.3 | 2,192,810 | Common Stock |
| Richard P. Wallace | President and CEO | Sale of securities on an exchange or to another person at price $ 379.15 per share. | 15 Aug 2022 | 3,685 | 262,377 (0%) | 0% | 379.2 | 1,397,168 | Common Stock |
| Edward W. Barnholt | Director | Gift of securities by or to the insider at price $ 0.00 per share. | 10 Aug 2022 | 2,850 | 25,431 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 375.00 per share. | 10 Aug 2022 | 255 | 32,906 (0%) | 0% | 375 | 95,625 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 390.85 per share. | 08 Aug 2022 | 325 | 5,291 (0%) | 0% | 390.8 | 127,026 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Sale of securities on an exchange or to another person at price $ 390.85 per share. | 08 Aug 2022 | 896 | 17,750 (0%) | 0% | 390.9 | 350,202 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 390.85 per share. | 08 Aug 2022 | 162 | 33,161 (0%) | 0% | 390.9 | 63,318 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 317 | 38,030 (0%) | 0% | 395.7 | 125,450 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 2,145 | 268,337 (0%) | 0% | 395.7 | 848,862 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 2,275 | 266,062 (0%) | 0% | 395.7 | 900,309 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 201 | 5,616 (0%) | 0% | 395.7 | 79,544 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 120 | 5,817 (0%) | 0% | 395.7 | 47,489 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 389.09 per share. | 05 Aug 2022 | 973 | 5,937 (0%) | 0% | 389.1 | 378,585 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 755 | 66,997 (0%) | 0% | 395.7 | 298,784 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 389.09 per share. | 05 Aug 2022 | 4,864 | 67,752 (0%) | 0% | 389.1 | 1,892,534 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 1,004 | 65,993 (0%) | 0% | 395.7 | 397,323 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 834 | 86,834 (0%) | 0% | 395.7 | 330,047 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 1,171 | 85,663 (0%) | 0% | 395.7 | 463,412 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 202 | 18,990 (0%) | 0% | 395.7 | 79,939 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 344 | 18,646 (0%) | 0% | 395.7 | 136,135 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 502 | 33,323 (0%) | 0% | 395.7 | 198,661 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 389.09 per share. | 05 Aug 2022 | 1,054 | 34,143 (0%) | 0% | 389.1 | 410,101 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 318 | 33,825 (0%) | 0% | 395.7 | 125,845 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 395.74 per share. | 05 Aug 2022 | 498 | 37,532 (0%) | 0% | 395.7 | 197,079 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 389.09 per share. | 05 Aug 2022 | 2,072 | 38,347 (0%) | 0% | 389.1 | 806,194 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 19,294 | 77,400 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 5,961 | 58,106 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 397.40 per share. | 04 Aug 2022 | 4,784 | 72,616 (0%) | 0% | 397.4 | 1,901,162 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 397.40 per share. | 04 Aug 2022 | 5,581 | 87,668 (0%) | 0% | 397.4 | 2,217,889 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 22,510 | 93,249 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 6,260 | 70,739 (0%) | 0% | 0 | Common Stock | |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 2,384 | 19,192 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 2,980 | 28,909 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 397.40 per share. | 04 Aug 2022 | 2,073 | 35,197 (0%) | 0% | 397.4 | 823,810 | Common Stock |
| Brian Lorig | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 8,361 | 37,270 (0%) | 0% | 0 | Common Stock | |
| Oreste Donzella | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 2,545 | 34,496 (0%) | 0% | 0 | Common Stock | |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 397.40 per share. | 04 Aug 2022 | 2,117 | 40,419 (0%) | 0% | 397.4 | 841,296 | Common Stock |
| Oreste Donzella | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 8,040 | 42,536 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 57,885 | 284,832 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 397.40 per share. | 04 Aug 2022 | 14,350 | 270,482 (0%) | 0% | 397.4 | 5,702,690 | Common Stock |
| Richard P. Wallace | President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 16,097 | 226,947 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 397.40 per share. | 04 Aug 2022 | 957 | 6,910 (0%) | 0% | 397.4 | 380,312 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 3,859 | 7,867 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Aug 2022 | 894 | 4,008 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 383.11 per share. | 03 Aug 2022 | 1,399 | 3,114 (0%) | 0% | 383.1 | 535,971 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 383.11 per share. | 03 Aug 2022 | 5,330 | 52,145 (0%) | 0% | 383.1 | 2,041,976 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 383.11 per share. | 03 Aug 2022 | 1,280 | 25,929 (0%) | 0% | 383.1 | 490,381 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 3,420 | 210,850 (0%) | 0% | 382.7 | 1,308,800 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 13,747 | 214,270 (0%) | 0% | 382.7 | 5,260,839 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 796 | 4,855 (0%) | 0% | 382.7 | 304,621 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 383.71 per share. | 02 Aug 2022 | 420 | 5,651 (0%) | 0% | 383.7 | 161,158 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 342 | 4,513 (0%) | 0% | 382.7 | 130,880 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 3,819 | 58,900 (0%) | 0% | 382.7 | 1,461,493 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 1,425 | 57,475 (0%) | 0% | 382.7 | 545,333 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 1,568 | 64,479 (0%) | 0% | 382.7 | 600,058 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 4,201 | 66,047 (0%) | 0% | 382.7 | 1,607,681 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 684 | 27,209 (0%) | 0% | 382.7 | 261,760 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 383.71 per share. | 02 Aug 2022 | 351 | 29,726 (0%) | 0% | 383.7 | 134,682 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 1,833 | 27,893 (0%) | 0% | 382.7 | 701,471 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 2,028 | 32,708 (0%) | 0% | 382.7 | 776,095 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 382.69 per share. | 02 Aug 2022 | 757 | 31,951 (0%) | 0% | 382.7 | 289,696 | Common Stock |
| Richard P. Wallace | President and CEO | Other type of transaction at price $ 271.21 per share. | 01 Aug 2022 | 57 | 231,206 (0%) | 0% | 271.2 | 15,459 | Common Stock |
| Richard P. Wallace | President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 385.64 per share. | 01 Aug 2022 | 3,189 | 228,017 (0%) | 0% | 385.6 | 1,229,806 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 385.64 per share. | 01 Aug 2022 | 223 | 6,071 (0%) | 0% | 385.6 | 85,998 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Other type of transaction at price $ 271.21 per share. | 01 Aug 2022 | 57 | 64,314 (0%) | 0% | 271.2 | 15,459 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 385.64 per share. | 01 Aug 2022 | 1,595 | 62,719 (0%) | 0% | 385.6 | 615,096 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 385.64 per share. | 01 Aug 2022 | 1,861 | 70,248 (0%) | 0% | 385.6 | 717,676 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Other type of transaction at price $ 271.21 per share. | 01 Aug 2022 | 57 | 72,109 (0%) | 0% | 271.2 | 15,459 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 385.64 per share. | 01 Aug 2022 | 691 | 30,077 (0%) | 0% | 385.6 | 266,477 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 385.64 per share. | 01 Aug 2022 | 706 | 34,736 (0%) | 0% | 385.6 | 272,262 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 375.00 per share. | 29 Jul 2022 | 29 | 30,768 (0%) | 0% | 375 | 10,875 | Common Stock |
| Brian Lorig | Executive Vice President | Other type of transaction at price $ 271.21 per share. | 29 Jul 2022 | 57 | 30,797 (0%) | 0% | 271.2 | 15,459 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 320.00 per share. | 14 Jul 2022 | 96 | 35,442 (0%) | 0% | 320 | 30,720 | Common Stock |
| Oreste Donzella | Executive Vice President | Other type of transaction at price $ 271.21 per share. | 14 Jul 2022 | 57 | 35,538 (0%) | 0% | 271.2 | 15,459 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Other type of transaction at price $ 271.21 per share. | 05 Jul 2022 | 57 | 354 (0%) | 0% | 271.2 | 15,459 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 286.28 per share. | 05 Jul 2022 | 57 | 1,229 (0%) | 0% | 286.3 | 16,318 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Other type of transaction at price $ 271.21 per share. | 05 Jul 2022 | 57 | 1,286 (0%) | 0% | 271.2 | 15,459 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 286.28 per share. | 05 Jul 2022 | 57 | 297 (0%) | 0% | 286.3 | 16,318 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 337.02 per share. | 24 May 2022 | 1,020 | 64,257 (0%) | 0% | 337.0 | 343,760 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 331.47 per share. | 11 Apr 2022 | 20,547 | 231,149 (0%) | 0% | 331.5 | 6,810,714 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 365.05 per share. | 20 Mar 2022 | 6,849 | 65,277 (0%) | 0% | 365.0 | 2,500,227 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 365.05 per share. | 20 Mar 2022 | 7,534 | 72,052 (0%) | 0% | 365.1 | 2,750,287 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 365.05 per share. | 20 Mar 2022 | 3,175 | 30,740 (0%) | 0% | 365.1 | 1,159,034 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 365.05 per share. | 20 Mar 2022 | 3,024 | 35,481 (0%) | 0% | 365.0 | 1,103,911 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 346.58 per share. | 01 Mar 2022 | 1,772 | 38,505 (0%) | 0% | 346.6 | 614,140 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 355.06 per share. | 22 Feb 2022 | 1,418 | 72,126 (0%) | 0% | 355.1 | 503,475 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 422.59 per share. | 18 Nov 2021 | 3,883 | 73,544 (0%) | 0% | 422.6 | 1,640,917 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Sale of securities on an exchange or to another person at price $ 422.59 per share. | 18 Nov 2021 | 885 | 79,586 (0%) | 0% | 422.6 | 373,992 | Common Stock |
| Robert M. Calderoni | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Nov 2021 | 558 | 1,464 (0%) | 0% | 0 | Common Stock | |
| Victor Peng | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Nov 2021 | 558 | 4,065 (0%) | 0% | 0 | Common Stock | |
| Robert A. Rango | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Nov 2021 | 558 | 13,415 (0%) | 0% | 0 | Common Stock | |
| Gary B. Moore | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Nov 2021 | 558 | 13,481 (0%) | 0% | 0 | Common Stock | |
| Emiko Higashi | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Nov 2021 | 558 | 13,478 (0%) | 0% | 0 | Common Stock | |
| Marie Myers | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Nov 2021 | 558 | 2,333 (0%) | 0% | 0 | Common Stock | |
| Jeneanne M. Hanley | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Nov 2021 | 558 | 3,350 (0%) | 0% | 0 | Common Stock | |
| Edward W. Barnholt | Director, Chairman of the Board | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Nov 2021 | 736 | 13,741 (0%) | 0% | 0 | Common Stock | |
| Kiran M. Patel | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Nov 2021 | 558 | 1,464 (0%) | 0% | 0 | Common Stock | |
| Kevin J. Kennedy | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Nov 2021 | 558 | 1,464 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 380.26 per share. | 01 Nov 2021 | 872 | 80,471 (0%) | 0% | 380.3 | 331,587 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 381.04 per share. | 01 Nov 2021 | 590 | 40,277 (0%) | 0% | 381.0 | 224,814 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 380.26 per share. | 01 Nov 2021 | 581 | 40,867 (0%) | 0% | 380.3 | 220,931 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 21 Sep 2021 | 5,522 | 5,522 (0%) | 0% | 0 | Common Stock | |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Sale of securities on an exchange or to another person at price $ 359.13 per share. | 21 Sep 2021 | 3,505 | 0 (0%) | 0% | 359.1 | 1,258,751 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Payment of exercise price or tax liability using portion of securities received from the company at price $ 356.58 per share. | 21 Sep 2021 | 2,017 | 3,505 (0%) | 0% | 356.6 | 719,222 | Common Stock |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 21 Sep 2021 | 5,522 | 16,808 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 335.92 per share. | 09 Sep 2021 | 6,617 | 6,827 (0%) | 0% | 335.9 | 2,222,783 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 341.16 per share. | 08 Sep 2021 | 1,129 | 6,357 (0%) | 0% | 341.2 | 385,170 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Sale of securities on an exchange or to another person at price $ 325.70 per share. | 25 Aug 2021 | 12,806 | 1,055 (0%) | 0% | 325.7 | 4,170,914 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 349.54 per share. | 10 Aug 2021 | 1,600 | 56,494 (0%) | 0% | 349.5 | 559,259 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 348.73 per share. | 10 Aug 2021 | 2,011 | 58,094 (0%) | 0% | 348.7 | 701,300 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 347.77 per share. | 10 Aug 2021 | 2,284 | 60,105 (0%) | 0% | 347.8 | 794,304 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 346.27 per share. | 10 Aug 2021 | 800 | 62,389 (0%) | 0% | 346.3 | 277,019 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 345.69 per share. | 10 Aug 2021 | 1,166 | 63,189 (0%) | 0% | 345.7 | 403,075 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 344.46 per share. | 10 Aug 2021 | 6,474 | 64,355 (0%) | 0% | 344.5 | 2,230,008 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 343.40 per share. | 10 Aug 2021 | 6,897 | 70,829 (0%) | 0% | 343.4 | 2,368,430 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 341.65 per share. | 10 Aug 2021 | 14,854 | 83,130 (0%) | 0% | 341.6 | 5,074,810 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 342.56 per share. | 10 Aug 2021 | 5,404 | 77,726 (0%) | 0% | 342.6 | 1,851,200 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 351.19 per share. | 10 Aug 2021 | 300 | 56,194 (0%) | 0% | 351.2 | 105,357 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 352.98 per share. | 09 Aug 2021 | 204 | 297 (0%) | 0% | 353.0 | 72,008 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 352.98 per share. | 09 Aug 2021 | 510 | 2,399 (0%) | 0% | 353.0 | 180,020 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 352.98 per share. | 09 Aug 2021 | 1,182 | 7,486 (0%) | 0% | 353.0 | 417,222 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.35 per share. | 06 Aug 2021 | 2,275 | 97,984 (0%) | 0% | 353.3 | 803,871 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 4,587 | 195,502 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 4,587 | 100,259 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.35 per share. | 06 Aug 2021 | 201 | 501 (0%) | 0% | 353.3 | 71,023 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 405 | 702 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 405 | 5,997 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 351.54 per share. | 06 Aug 2021 | 932 | 297 (0%) | 0% | 351.5 | 327,635 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 2,024 | 70,600 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.35 per share. | 06 Aug 2021 | 1,004 | 13,444 (0%) | 0% | 353.3 | 354,763 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 2,024 | 14,448 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.35 per share. | 06 Aug 2021 | 1,171 | 13,861 (0%) | 0% | 353.4 | 413,773 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 2,361 | 15,032 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 2,361 | 80,288 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 1,012 | 5,275 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 351.54 per share. | 06 Aug 2021 | 1,864 | 2,909 (0%) | 0% | 351.5 | 655,271 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.35 per share. | 06 Aug 2021 | 502 | 4,773 (0%) | 0% | 353.4 | 177,382 | Common Stock |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 1,012 | 33,349 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.35 per share. | 06 Aug 2021 | 469 | 8,668 (0%) | 0% | 353.3 | 165,721 | Common Stock |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 945 | 9,137 (0%) | 0% | 0 | Common Stock | |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Aug 2021 | 945 | 35,091 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Richard P. Wallace | Director, President and CEO | Other type of transaction at price $ 0.00 per share. | 05 Aug 2021 | 7,365 | 200,089 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 27,727 | 207,454 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Richard P. Wallace | Director, President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 55,453 | 235,181 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 27,727 | 109,420 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | Director, President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.71 per share. | 05 Aug 2021 | 13,748 | 95,672 (0%) | 0% | 353.7 | 4,862,805 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 17,298 | 179,728 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 1,849 | 2,146 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 961 | 4,554 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 3,697 | 8,251 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 1,849 | 6,402 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.71 per share. | 05 Aug 2021 | 917 | 1,229 (0%) | 0% | 353.7 | 324,352 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 6,086 | 64,923 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.71 per share. | 05 Aug 2021 | 3,819 | 12,424 (0%) | 0% | 353.7 | 1,350,818 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 7,702 | 16,243 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 7,702 | 72,624 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Bren D. Higgins | EVP & Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 15,403 | 80,326 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Ahmad A. Khan | President, Semi Proc. Control | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 16,944 | 91,121 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Ahmad A. Khan | President, Semi Proc. Control | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 8,472 | 82,649 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Ahmad A. Khan | President, Semi Proc. Control | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 8,472 | 16,872 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.71 per share. | 05 Aug 2021 | 4,201 | 12,671 (0%) | 0% | 353.7 | 1,485,936 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 6,727 | 74,177 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.71 per share. | 05 Aug 2021 | 4,201 | 12,671 (0%) | 0% | 353.7 | 1,485,936 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 8,472 | 16,872 (0%) | 0% | 0 | Common Stock | |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 3,203 | 22,330 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Mary Beth Wilkinson | EVP, CLO and Secretary | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 2,562 | 19,127 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.71 per share. | 05 Aug 2021 | 1,833 | 2,430 (0%) | 0% | 353.7 | 648,350 | Common Stock |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 3,697 | 4,263 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 3,697 | 34,361 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Brian Lorig | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 7,394 | 38,058 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Brian Lorig | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 2,562 | 30,664 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Oreste Donzella | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 7,702 | 39,887 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 3,851 | 36,036 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Aug 2021 | 3,851 | 10,102 (0%) | 0% | 0 | Common Stock | |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 353.71 per share. | 05 Aug 2021 | 1,910 | 8,192 (0%) | 0% | 353.7 | 675,586 | Common Stock |
| Oreste Donzella | Executive Vice President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Aug 2021 | 2,402 | 32,185 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 346.89 per share. | 04 Aug 2021 | 1,103 | 297 (0%) | 0% | 346.9 | 382,620 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 346.89 per share. | 04 Aug 2021 | 1,654 | 566 (0%) | 0% | 346.9 | 573,756 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 346.89 per share. | 04 Aug 2021 | 472 | 6,251 (0%) | 0% | 346.9 | 163,732 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 7,504 | 162,430 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 28,140 | 169,934 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 28,140 | 91,862 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | Director, President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 346.89 per share. | 03 Aug 2021 | 13,952 | 77,910 (0%) | 0% | 346.9 | 4,839,809 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 7,504 | 85,414 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | Director, President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 346.89 per share. | 03 Aug 2021 | 3,721 | 81,693 (0%) | 0% | 346.9 | 1,290,778 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 347.23 per share. | 03 Aug 2021 | 451 | 297 (0%) | 0% | 347.2 | 156,601 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 1,564 | 4,218 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 1,564 | 1,861 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 346.89 per share. | 03 Aug 2021 | 776 | 1,085 (0%) | 0% | 346.9 | 269,187 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 625 | 3,593 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 625 | 1,710 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 346.89 per share. | 03 Aug 2021 | 310 | 1,400 (0%) | 0% | 346.9 | 107,536 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 7,035 | 61,651 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 346.89 per share. | 03 Aug 2021 | 1,396 | 8,541 (0%) | 0% | 346.9 | 484,258 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 2,814 | 9,937 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 2,814 | 58,837 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 346.89 per share. | 03 Aug 2021 | 3,488 | 7,123 (0%) | 0% | 346.9 | 1,209,952 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 7,035 | 10,611 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 346.89 per share. | 03 Aug 2021 | 1,085 | 8,400 (0%) | 0% | 346.9 | 376,376 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 346.89 per share. | 03 Aug 2021 | 466 | 2,915 (0%) | 0% | 346.9 | 161,651 | Common Stock |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 2,345 | 3,606 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 347.23 per share. | 03 Aug 2021 | 695 | 2,220 (0%) | 0% | 347.2 | 241,325 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 346.89 per share. | 03 Aug 2021 | 1,163 | 2,443 (0%) | 0% | 346.9 | 403,433 | Common Stock |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 938 | 28,102 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 938 | 3,381 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 2,345 | 29,040 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 347.23 per share. | 03 Aug 2021 | 940 | 5,069 (0%) | 0% | 347.2 | 326,396 | Common Stock |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 2,345 | 30,721 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 2,345 | 7,414 (0%) | 0% | 0 | Common Stock | |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 346.89 per share. | 03 Aug 2021 | 1,163 | 6,251 (0%) | 0% | 346.9 | 403,433 | Common Stock |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 938 | 29,783 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Aug 2021 | 938 | 7,189 (0%) | 0% | 0 | Common Stock | |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 346.89 per share. | 03 Aug 2021 | 466 | 6,723 (0%) | 0% | 346.9 | 161,651 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 02 Aug 2021 | 6,897 | 67,142 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | Director, President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 345.91 per share. | 02 Aug 2021 | 3,420 | 63,722 (0%) | 0% | 345.9 | 1,183,012 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 02 Aug 2021 | 6,897 | 198,074 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 02 Aug 2021 | 2,874 | 68,686 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 345.91 per share. | 02 Aug 2021 | 1,425 | 3,576 (0%) | 0% | 345.9 | 492,922 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 02 Aug 2021 | 2,874 | 5,001 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 0.00 per share. | 02 Aug 2021 | 1,568 | 4,539 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 02 Aug 2021 | 3,161 | 6,107 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 02 Aug 2021 | 3,161 | 75,109 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Richard P. Wallace | Director, President and CEO | Other type of transaction at price $ 221.28 per share. | 01 Aug 2021 | 96 | 57,002 (0%) | 0% | 221.3 | 21,243 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 6,432 | 204,971 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Richard P. Wallace | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 6,432 | 63,434 (0%) | 0% | 0 | Common Stock | |
| Richard P. Wallace | Director, President and CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 348.16 per share. | 01 Aug 2021 | 3,189 | 60,245 (0%) | 0% | 348.2 | 1,110,282 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 690 | 5,782 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 643 | 6,472 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 643 | 940 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 348.16 per share. | 01 Aug 2021 | 223 | 717 (0%) | 0% | 348.2 | 77,640 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 345.91 per share. | 01 Aug 2021 | 239 | 748 (0%) | 0% | 345.9 | 82,672 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 348.16 per share. | 01 Aug 2021 | 420 | 297 (0%) | 0% | 348.2 | 146,227 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 690 | 987 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Other type of transaction at price $ 221.28 per share. | 01 Aug 2021 | 96 | 506 (0%) | 0% | 221.3 | 21,243 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Payment of exercise price or tax liability using portion of securities received from the company at price $ 0.00 per share. | 01 Aug 2021 | 1,595 | 2,127 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 3,216 | 3,722 (0%) | 0% | 0 | Common Stock | |
| Bren D. Higgins | EVP & Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 3,216 | 71,560 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Ahmad A. Khan | President, Semi Proc. Control | Other type of transaction at price $ 221.28 per share. | 01 Aug 2021 | 96 | 1,055 (0%) | 0% | 221.3 | 21,243 | Common Stock |
| Ahmad A. Khan | President, Semi Proc. Control | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 3,752 | 4,807 (0%) | 0% | 0 | Common Stock | |
| Ahmad A. Khan | President, Semi Proc. Control | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 3,752 | 78,270 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Ahmad A. Khan | President, Semi Proc. Control | Payment of exercise price or tax liability using portion of securities received from the company at price $ 0.00 per share. | 01 Aug 2021 | 1,861 | 2,946 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 348.16 per share. | 01 Aug 2021 | 519 | 1,441 (0%) | 0% | 348.2 | 180,695 | Common Stock |
| Brian Lorig | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 345.91 per share. | 01 Aug 2021 | 684 | 1,261 (0%) | 0% | 345.9 | 236,602 | Common Stock |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 1,379 | 1,945 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 1,379 | 31,385 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 348.16 per share. | 01 Aug 2021 | 875 | 566 (0%) | 0% | 348.2 | 304,640 | Common Stock |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 1,394 | 1,960 (0%) | 0% | 0 | Common Stock | |
| Brian Lorig | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 1,394 | 32,764 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 1,340 | 34,503 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 1,437 | 6,722 (0%) | 0% | 0 | Common Stock | |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 345.91 per share. | 01 Aug 2021 | 713 | 6,009 (0%) | 0% | 345.9 | 246,634 | Common Stock |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 1,437 | 33,066 (0%) | 0% | 0 | Common Stock - Restricted Stock Units | |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 348.16 per share. | 01 Aug 2021 | 876 | 5,285 (0%) | 0% | 348.2 | 304,988 | Common Stock |
| Oreste Donzella | Executive Vice President | Payment of exercise price or tax liability using portion of securities received from the company at price $ 348.16 per share. | 01 Aug 2021 | 464 | 6,161 (0%) | 0% | 348.2 | 161,546 | Common Stock |
| Oreste Donzella | Executive Vice President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Aug 2021 | 1,340 | 6,625 (0%) | 0% | 0 | Common Stock | |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 313.73 per share. | 02 Jul 2021 | 96 | 297 (0%) | 0% | 313.7 | 30,118 | Common Stock |
| Virendra A. Kirloskar | SVP & Chief Accounting Officer | Other type of transaction at price $ 221.28 per share. | 02 Jul 2021 | 96 | 393 (0%) | 0% | 221.3 | 21,243 | Common Stock |
| Brian Lorig | Executive Vice President | Sale of securities on an exchange or to another person at price $ 313.73 per share. | 02 Jul 2021 | 96 | 566 (0%) | 0% | 313.7 | 30,118 | Common Stock |
| Brian Lorig | Executive Vice President | Other type of transaction at price $ 221.28 per share. | 02 Jul 2021 | 96 | 662 (0%) | 0% | 221.3 | 21,243 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 324.15 per share. | 01 Jul 2021 | 136 | 5,285 (0%) | 0% | 324.1 | 44,084 | Common Stock |
| Oreste Donzella | Executive Vice President | Other type of transaction at price $ 221.28 per share. | 01 Jul 2021 | 96 | 5,421 (0%) | 0% | 221.3 | 21,243 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 315.00 per share. | 24 May 2021 | 5,000 | 56,906 (0%) | 0% | 315 | 1,575,000 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 310.97 per share. | 20 May 2021 | 1,418 | 410 (0%) | 0% | 311.0 | 440,953 | Common Stock |
| Gary B. Moore | Director | Purchase of securities on an exchange or from another person at price $ 301.02 per share. | 11 May 2021 | 377 | 12,017 (0%) | 0% | 301.0 | 113,486 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 309.95 per share. | 10 May 2021 | 15,000 | 61,906 (0%) | 0% | 310.0 | 4,649,250 | Common Stock |
| Bren D. Higgins | EVP & Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 322.69 per share. | 25 Feb 2021 | 3,795 | 1,828 (0%) | 0% | 322.7 | 1,224,609 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 329.38 per share. | 19 Feb 2021 | 274 | 5,325 (0%) | 0% | 329.4 | 90,250 | Common Stock |
| Oreste Donzella | Executive Vice President | Sale of securities on an exchange or to another person at price $ 300.90 per share. | 08 Feb 2021 | 1,287 | 5,599 (0%) | 0% | 300.9 | 387,258 | Common Stock |
| Richard P. Wallace | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 301.60 per share. | 03 Feb 2021 | 4,216 | 76,906 (0%) | 0% | 301.6 | 1,271,546 | Common Stock |
| Kevin J. Kennedy | Director | Sale of securities on an exchange or to another person at price $ 285.43 per share. | 01 Feb 2021 | 500 | 6,352 (0%) | 0% | 285.4 | 142,714 | Common Stock |
| Kevin J. Kennedy | Director | Sale of securities on an exchange or to another person at price $ 293.45 per share. | 01 Feb 2021 | 300 | 4,821 (0%) | 0% | 293.5 | 88,035 | Common Stock |
| Kevin J. Kennedy | Director | Sale of securities on an exchange or to another person at price $ 292.21 per share. | 01 Feb 2021 | 422 | 5,121 (0%) | 0% | 292.2 | 123,313 | Common Stock |
| Kevin J. Kennedy | Director | Sale of securities on an exchange or to another person at price $ 290.15 per share. | 01 Feb 2021 | 300 | 5,543 (0%) | 0% | 290.1 | 87,044 | Common Stock |